Receiver and amplifier optimization for hybrid MOEMS

Light flux modulators based on micro-opto-electro-mechanical systems (MOEMS) enable high resolution displacement based inertial sensors. The three major noise sources for such devices are the Brownian noise originating from the surrounding air, the noise emerging from the optoelectronic detector and the noise contributed by the amplifier circuit. To unveil the resolution limiting mechanisms, we investigated the performance of a transimpedance amplifier in relation to opto-electrical receivers. To verify this approach, a SPICE simulation model including all noise sources was set up and compared with measurements. The experimental data suggest that the noise of the utilized transimpedance amplifier can be optimized for a given dynamic resistance and noise current of a given photoreceiver.