The development of A 3‐dimensional vibration measuring system with corner cubes and quadrant detectors(Invited)

In this paper, a new optical 3‐dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam‐splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer‐angle. So, the three‐dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three‐dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.