Growth of single-crystal CrN on MgO(001): Effects of low-energy ion-irradiation on surface morphological evolution and physical properties

Authors :: C.-S. Shin
Joseph E Greene
Daniel Gall
Magnus Odén
Ivan Petrov
T. Spila
M. J. H. Senna
Source :: Journal of Applied Physics. 91:3589-3597
Publication Year :: 2002
Publisher :: AIP Publishing, 2002.
Abstract: CrN layers, 0.5 ╡m thick, were grown on MgO(001) at Ts=570-775░C by ultrahigh vacuum magnetically unbalanced magnetron sputter deposition in pure N2 discharges at 20 mTorr. Layers grown at Ts=700░C ...

Subjects :: Surface diffusion
Lattice constant
Materials science
Electrical resistivity and conductivity
Cavity magnetron
Analytical chemistry
General Physics and Astronomy
Irradiation
Sputter deposition
Single crystal
Ion

Full Text Access

Tools