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Growth characteristics of chloride-based SiC epitaxial growth

Authors :
Anders Lundskog
Stefano Leone
Anne Henry
Henrik Pedersen
Erik Janzén
Source :
physica status solidi (RRL) - Rapid Research Letters. 2:278-280
Publication Year :
2008
Publisher :
Wiley, 2008.

Abstract

In this study some aspects of the chloride-based CVD growth process have been investigated by using both the approach to add HCl to the standard precursors and by using the single molecule precurso ...

Subjects

Subjects :
Chemical engineering
Chemistry
Stereochemistry
Scientific method
medicine
Molecule
General Materials Science
Condensed Matter Physics
Epitaxy
Chloride
medicine.drug

Details

ISSN :
18626270 and 18626254
Volume :
2
Database :
OpenAIRE
Journal :
physica status solidi (RRL) - Rapid Research Letters
Accession number :
edsair.doi...........bc4720b4ff6ea75d08fc02ecc8c5cccc
Full Text :
https://doi.org/10.1002/pssr.200802183
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