Thickness Uniformity of Large Area PZT Films Formed by Aerosol Deposition

MLA

J. Akedo, and A. Iwata. “Thickness Uniformity of Large Area PZT Films Formed by Aerosol Deposition.” 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics, May 2007. EBSCOhost, https://doi.org/10.1109/isaf.2007.4393294.

APA

J. Akedo, & A. Iwata. (2007). Thickness Uniformity of Large Area PZT Films Formed by Aerosol Deposition. 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics. https://doi.org/10.1109/isaf.2007.4393294

Chicago

J. Akedo, and A. Iwata. 2007. “Thickness Uniformity of Large Area PZT Films Formed by Aerosol Deposition.” 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics, May. doi:10.1109/isaf.2007.4393294.