Characterization of the radiation-enhanced diffusion of dry-etch damage in n-GaAs

MLA

Yi-Jen Chiu, et al. “Characterization of the Radiation-Enhanced Diffusion of Dry-Etch Damage in n-GaAs.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 15, Nov. 1997, p. 2648. EBSCOhost, https://doi.org/10.1116/1.589701.

APA

Yi-Jen Chiu, Evelyn L. Hu, & Ching-Hui Chen. (1997). Characterization of the radiation-enhanced diffusion of dry-etch damage in n-GaAs. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 15, 2648. https://doi.org/10.1116/1.589701

Chicago

Yi-Jen Chiu, Evelyn L. Hu, and Ching-Hui Chen. 1997. “Characterization of the Radiation-Enhanced Diffusion of Dry-Etch Damage in n-GaAs.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 15 (November): 2648. doi:10.1116/1.589701.