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Subnanoporosity development in hydrocarbon-siliconoxide hybrid PECVD films elucidated by variable-energy positron annihilation
- Source :
- JJAP Conference Proceedings. 2:011210-011210
- Publication Year :
- 2014
- Publisher :
- The Japan Society of Applied Physics, 2014.
Details
- ISSN :
- 27582450
- Volume :
- 2
- Database :
- OpenAIRE
- Journal :
- JJAP Conference Proceedings
- Accession number :
- edsair.doi...........bfee072bb20011dff0fa962acdfe2f58