Influence of Mn-doping on The Structure Properties of ZnO∶Mn Thin Films

ZnO∶ Mn thin films with different Mn concentration were prepared on glass substrates at room temperature using RF magnetron sputtering method.Raman spectroscopy,X-ray diffraction spectra and SEM were used to analyze the structural characteristics of the ZnO∶ Mn films.The results show that ZnO∶ Mn thin films have significant wurtzite structure with Mn doping mole fraction from 0 up to 5.6%.The redshift of Raman peaks at 437 cm-1and 527 cm-1can be explained by the lattice defects and disorder induced by the increasing of Mn concentration.The appearance of Raman spectra at 647 cm-1indicates the formation of MnO,leading to the worse crystallization of ZnO∶ Mn films,which is also evidenced by XRD and SEM results.