The gas multisensor chip fabricated by direct electrochemical deposition of tin oxide

We report a direct synthesis of tin oxide layers onto Si/SiO2 chip equipped with Pt multiple electrodes to develop new gas-analytical multisensor arrays. The tailored local morphology of the layer makes it possible to differentiate the gas response of each layer segment and to build a gas-selective vector signal recognized by pattern recognition algorithms in frames of conventional multisensor principles. The response of the chip to alcohols is in the ppm range.