Investigation of ZrSi2 for application to EUV pellicle

MLA

Seong Ju Wi, et al. “Investigation of ZrSi2 for Application to EUV Pellicle.” International Conference on Extreme Ultraviolet Lithography 2022, Nov. 2022. EBSCOhost, https://doi.org/10.1117/12.2641822.

APA

Seong Ju Wi, Chang Soo Kim, Haneul Kim, Jaehyuck Choi, Kyoung-Won Seo, & Jinho Ahn. (2022). Investigation of ZrSi2 for application to EUV pellicle. International Conference on Extreme Ultraviolet Lithography 2022. https://doi.org/10.1117/12.2641822

Chicago

Seong Ju Wi, Chang Soo Kim, Haneul Kim, Jaehyuck Choi, Kyoung-Won Seo, and Jinho Ahn. 2022. “Investigation of ZrSi2 for Application to EUV Pellicle.” International Conference on Extreme Ultraviolet Lithography 2022, November. doi:10.1117/12.2641822.