Spectroscopic ellipsometry characterization of coatings on biaxially anisotropic polymeric substrates

Spectroscopic ellipsometry characterization of coatings on polymeric substrates can be challenging due to the substrate optical anisotropy. We compare four characterization strategies for thin coating layers on anisotropic polymeric substrates with regard to accuracy of the resulting layer thickness and coating optical constants. Each strategy differs in measured data type, model construction, implementation complexity, and inherent capabilities and sensitivity to the coating properties. Best practices and limitations are discussed for each strategy.