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Investigation of Damage area on DLC film surface using X-ray Photoemission Electron Microscopy
- Source :
- The Proceedings of the Materials and processing conference. :206
- Publication Year :
- 2019
- Publisher :
- Japan Society of Mechanical Engineers, 2019.
Details
- ISSN :
- 2424287X
- Database :
- OpenAIRE
- Journal :
- The Proceedings of the Materials and processing conference
- Accession number :
- edsair.doi...........c43c3fcd15c2550da044fd31ddce3e53