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Rotatable broadband retarders for far-infrared spectroscopic ellipsometry
- Source :
- Thin Solid Films. 519:2698-2702
- Publication Year :
- 2011
- Publisher :
- Elsevier BV, 2011.
-
Abstract
- Rotatable retarders have been developed for applications in spectroscopic, full Mueller Matrix ellipsometry in the far-IR spectral range. Several materials, such as silicon, KRS-5, and a commercial polymer plastic (TOPAS) have been utilized to achieve a fully adjustable retardation between 0° and 90°. Experimental characteristics of the rotatable retarders that utilize three- and four-bounce designs are compared with calculations. We discuss the effect of light focusing on the performance of these rotatable retarders.
- Subjects :
- Total internal reflection
Materials science
Silicon
business.industry
Metals and Alloys
chemistry.chemical_element
Surfaces and Interfaces
Retarder
Polarization (waves)
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
Optics
Far infrared
chemistry
Ellipsometry
Materials Chemistry
Measuring instrument
Mueller calculus
business
Subjects
Details
- ISSN :
- 00406090
- Volume :
- 519
- Database :
- OpenAIRE
- Journal :
- Thin Solid Films
- Accession number :
- edsair.doi...........c4565c2a38e9bce6f30a519f33e54e74
- Full Text :
- https://doi.org/10.1016/j.tsf.2010.12.057