LT-GaAs with high breakdown strength at low temperature for power MISFET applications

Low temperature grown GaAs has been fabricated containing a limited amount of excess arsenic. The material has a low conductivity in the order of 100KΩ cm, due to hopping in a deep donor band. This σ-LT-GaAs was grown reproducibly by using the lattice mismatch as the primary parameter for substrate temperature calibration. Breakdown fields, in the order of 100kV/cm, are observed for planar structures and increased at low measurement emperatures. Low hopping conductivity and high breakdown field are also observed in the lossy dielectric metal-insulator-semiconductor field-effect transistor device using σ-LT-GaAs as a surface layer. The record radio frequency power density of 4.0W/mm at 77K is extracted from the dc output characteristics.