Solving Semiconductor Heat Conduction Problem Based on Ballistic-Diffusive Equation with Spectral Element Time-Domain Method

In this paper, we introduce the Ballistic-Diffusive equation for the Heat Conduction equation from nanometer to macroscopic description, which is suitable for nanoscale thermal characterization. And the spectral-element time-domain (SETD) method is applied to the solution of the Ballistic-Diffusive equation in one-dimensional simulation of semiconductor heat problem. The performance and accuracy of the proposed method were verified with literature data.