Specific Nature of Formation of Uncertainty in Measurements of the Geometric Parameters of Surface Texture by Means of Methods of High-Resolution Interferometry

The mechanism of formation of the uncertainty budget of measurements of the parameters of the texture and form of a surface in the nanometric range with reference to the typical optical circuits of the Twyman–Green and Fizeau interferometers is considered. It is noted that in most of the well-known studies a differential (difference) method of measurement is implemented. Amplitude and amplitude-phase interference methods of coordinate measurement of the deviation of the form of a surface are considered.