Correlation of PECVD SiOxNy dielectric layer structural properties and Si/SiOxNy/Al capacitors interface electrical properties

MLA

Inés Pereyra, and K. F. Albertin. “Correlation of PECVD SiOxNy Dielectric Layer Structural Properties and Si/SiOxNy/Al Capacitors Interface Electrical Properties.” Journal of Non-Crystalline Solids, vol. 352, June 2006, pp. 1438–43. EBSCOhost, https://doi.org/10.1016/j.jnoncrysol.2005.11.076.

APA

Inés Pereyra, & K. F. Albertin. (2006). Correlation of PECVD SiOxNy dielectric layer structural properties and Si/SiOxNy/Al capacitors interface electrical properties. Journal of Non-Crystalline Solids, 352, 1438–1443. https://doi.org/10.1016/j.jnoncrysol.2005.11.076

Chicago

Inés Pereyra, and K. F. Albertin. 2006. “Correlation of PECVD SiOxNy Dielectric Layer Structural Properties and Si/SiOxNy/Al Capacitors Interface Electrical Properties.” Journal of Non-Crystalline Solids 352 (June): 1438–43. doi:10.1016/j.jnoncrysol.2005.11.076.