Comparison of compressive and tensile relaxed composition-graded GaAsP and (Al)InGaP substrates

MLA

M. J. Mori, et al. “Comparison of Compressive and Tensile Relaxed Composition-Graded GaAsP and (Al)InGaP Substrates.” Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, vol. 28, Mar. 2010, pp. 182–88. EBSCOhost, https://doi.org/10.1116/1.3290762.

APA

M. J. Mori, Steven T. Boles, & Eugene A. Fitzgerald. (2010). Comparison of compressive and tensile relaxed composition-graded GaAsP and (Al)InGaP substrates. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 28, 182–188. https://doi.org/10.1116/1.3290762

Chicago

M. J. Mori, Steven T. Boles, and Eugene A. Fitzgerald. 2010. “Comparison of Compressive and Tensile Relaxed Composition-Graded GaAsP and (Al)InGaP Substrates.” Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 28 (March): 182–88. doi:10.1116/1.3290762.