Back to Search
Start Over
Depositing ALD-oxides on MLD-metalcones: enhancing initial growth through O2 plasma densification
- Source :
- Dalton Transactions.
- Publication Year :
- 2023
- Publisher :
- Royal Society of Chemistry (RSC), 2023.
-
Abstract
- The world of flexible devices has brought the interest to combine ALD and MLD films. However, direct ALD on MLD can suffer from stability/growth issues. Utilising O2 plasma, their compatibility can be enhanced, providing a more effective stacking.
- Subjects :
- Inorganic Chemistry
Subjects
Details
- ISSN :
- 14779234 and 14779226
- Database :
- OpenAIRE
- Journal :
- Dalton Transactions
- Accession number :
- edsair.doi...........cbec6c26065d2150d83a417f5f147afc
- Full Text :
- https://doi.org/10.1039/d3dt00378g