Experiment-based estimation of point spread function in electron-beam lithography: Forward-scattering part

MLA

Q. Dai, et al. “Experiment-Based Estimation of Point Spread Function in Electron-Beam Lithography: Forward-Scattering Part.” Microelectronic Engineering, vol. 88, Oct. 2011, pp. 3054–61. EBSCOhost, https://doi.org/10.1016/j.mee.2011.05.019.

APA

Q. Dai, Hwasuk Cho, Byeong-jae Kim, & Soo-Young Lee. (2011). Experiment-based estimation of point spread function in electron-beam lithography: Forward-scattering part. Microelectronic Engineering, 88, 3054–3061. https://doi.org/10.1016/j.mee.2011.05.019

Chicago

Q. Dai, Hwasuk Cho, Byeong-jae Kim, and Soo-Young Lee. 2011. “Experiment-Based Estimation of Point Spread Function in Electron-Beam Lithography: Forward-Scattering Part.” Microelectronic Engineering 88 (October): 3054–61. doi:10.1016/j.mee.2011.05.019.