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ChemInform Abstract: Some Considerations of the Thermodynamics and Kinetics of the Chemical Vapor Deposition of Tungsten
- Source :
- ChemInform. 21
- Publication Year :
- 1990
- Publisher :
- Wiley, 1990.
Details
- ISSN :
- 09317597
- Volume :
- 21
- Database :
- OpenAIRE
- Journal :
- ChemInform
- Accession number :
- edsair.doi...........ccb96c37ec1637cf4d869aca831d9936
- Full Text :
- https://doi.org/10.1002/chin.199010343