Back to Search
Start Over
Deposition of Er:YAG (YAP) layers by subpicosecond and nanosecond KrF excimer laser ablation
- Source :
- Applied Surface Science. :416-420
- Publication Year :
- 2002
- Publisher :
- Elsevier BV, 2002.
-
Abstract
- Thin films of Er:YAG and Er:YAP were deposited by subpicosecond (450 fs) and nanosecond (20 ns) KrF laser (λ=248 nm) on YAG, YAP, fused silica, silicon and sapphire substrates. Laser spot size, energy density, substrate temperature and deposition ambient (vacuum and oxygen) were varied. Comparison of growth rate, morphology, composition, crystallinity and adhesion of the films grown by subpicosecond and nanosecond deposition is presented.
- Subjects :
- Materials science
Silicon
Analytical chemistry
General Physics and Astronomy
chemistry.chemical_element
Surfaces and Interfaces
General Chemistry
Substrate (electronics)
Nanosecond
Condensed Matter Physics
Laser
Surfaces, Coatings and Films
Pulsed laser deposition
law.invention
Erbium
chemistry
law
Sapphire
Thin film
Subjects
Details
- ISSN :
- 01694332
- Database :
- OpenAIRE
- Journal :
- Applied Surface Science
- Accession number :
- edsair.doi...........ce29c71a80e27418187fe4d12235be6f
- Full Text :
- https://doi.org/10.1016/s0169-4332(02)00352-5