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Aerosol Deposition of Alumina Coatings on Patterned Si Substrates
- Publication Year :
- 2023
- Publisher :
- Elsevier BV, 2023.
Details
- Database :
- OpenAIRE
- Accession number :
- edsair.doi...........ce8b4498d406b80d0078dbad0867d33d
- Full Text :
- https://doi.org/10.2139/ssrn.4405706