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Near-field detection of photon emission from silicon with 30 nm spatial resolution
- Source :
- Microelectronics Reliability. 48:1285-1288
- Publication Year :
- 2008
- Publisher :
- Elsevier BV, 2008.
-
Abstract
- We demonstrate a scanning near-field photon emission microscope (SNPEM) for monitoring photon emission sites with spatial resolution beyond the diffraction limit. Success of SNPEM analysis strongly depends on the sensitivity of photon emission detection. We show that scattering dielectric probe (SDP) is capable of providing both sub-100 nm resolution and compatible sensitivity at emission wavelengths between 1 μm and 1.4 μm. We propose a two step fabrication method which avoids any metal coating and ensures repeatability of parameters of different probes. We also predict that fabrication of SDP from a multi-mode fiber instead of a single mode fiber can significantly improve the collection efficiency of the probe.
- Subjects :
- Diffraction
Materials science
Microscope
business.industry
Scattering
Resolution (electron density)
Single-mode optical fiber
Physics::Optics
Near and far field
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials
law.invention
Wavelength
Optics
law
Electrical and Electronic Engineering
Safety, Risk, Reliability and Quality
business
Image resolution
Subjects
Details
- ISSN :
- 00262714
- Volume :
- 48
- Database :
- OpenAIRE
- Journal :
- Microelectronics Reliability
- Accession number :
- edsair.doi...........d1f3f44081ba93733bb41b3c2fb30eb1