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Oxygen Precipitation in Highly Doped Silicon Substrates

Authors :
A. Giannattasio
M. Porrini
V. V. Voronkov
Source :
ECS Journal of Solid State Science and Technology. 8:P12-P17
Publication Year :
2019
Publisher :
The Electrochemical Society, 2019.

Subjects

Subjects :
Oxygen precipitation
Materials science
Chemical engineering
Silicon
chemistry
Doping
chemistry.chemical_element
Electronic, Optical and Magnetic Materials

Details

ISSN :
21628777 and 21628769
Volume :
8
Database :
OpenAIRE
Journal :
ECS Journal of Solid State Science and Technology
Accession number :
edsair.doi...........d22da54811c34de7c7d9f8dba18ecd0b
Full Text :
https://doi.org/10.1149/2.0081901jss
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