Experimental study of temperature effects in vibrating beam and thickness-shear resonators of GaPO/sub 4/ machined by ultrasonic milling

We report progress in modeling and measuring temperature effects in vibrating beam gallium orthophosphate (GaPO/sub 4/) resonators. In addition to the well known thickness-shear AT-cut, temperature compensated cuts exist in GaPO/sub 4/ for length extensional, flexural and torsional modes. Analytical models of temperature effects are compared with experimental measurements on devices fabricated on AT (Y-16.1/spl deg/) and Z-cut plates by ultrasonic machining. The agreement between theory and experiment is fairly good taking into account that temperature coefficients of GaPO/sub 4/ have been experimentally tested for only a few thickness-shear resonators.