Characteristics of Hydrogen Negative Ion Source with FET based RF System

Characteristics of radio frequency (RF) plasma production were investigated using a FET inverter power supply as a RF generator. High density hydrogen plasma was obtained using an external coil wound a cylindrical ceramic tube (driver region) with RF frequency of lower than 0.5 MHz. When an axial magnetic field around 10 mT was applied to the driver region, an electron density increased drastically and attained to over 10{sup 19} m{sup -3} in the driver region. Effect of the axial magnetic field in driver and expansion region was examined. Lower gas pressure operation below 0.5 Pa was possible with higher RF frequency. H{sup -} density in the expansion region was measured by using laser photo-detachment system. It decreased as the axial magnetic field applied, which was caused by the increase of energetic electron from the driver.