RHEED observation of BaTiO 3 thin films grown by MBE

Ferroelectric BaTiO 3 thin films with a thickness of 10 monolayers (ML) were epitaxially grown on SrTiO 3 (0 0 1) substrates by very slow deposition using molecular beam epitaxy (MBE). The investigations were carried out by two growth methods: (i) codeposition and (ii) alternate deposition of the metal elements in an oxygen atmosphere. In situ observation of reflection high-energy electron diffraction confirmed that an epitaxial cube-on-cube structure was prepared. After the deposition, X-ray diffraction measurements were carried out. The 10-ML-thick BaTiO 3 films were highly c -axis oriented single crystals with good film quality.