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Machine learning based error classification for curvilinear designs

Authors :
Lianghong Yin
Shumay Shang
Fan Jiang
Le Hong
Robin Chia
Juli Opitz
Paul Adam
Ian Stobert
Yee-Wee Koh
Source :
DTCO and Computational Patterning.
Publication Year :
2022
Publisher :
SPIE, 2022.

Details

Database :
OpenAIRE
Journal :
DTCO and Computational Patterning
Accession number :
edsair.doi...........d829523553be323ca06105a840fdff83

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