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A Back Illuminated 6 µm SPAD Pixel Array with High PDE and Timing Jitter Performance

Authors :
S. Shimada
Y. Otake
S. Yoshida
S. Endo
R. Nakamura
H. Tsugawa
T. Ogita
T. Ogasahara
K. Yokochi
Y. Inoue
K. Takabayashi
H. Maeda
K. Yamamoto
M. Ono
S. Matsumoto
H. Hiyama
T. Wakano
Source :
2021 IEEE International Electron Devices Meeting (IEDM).
Publication Year :
2021
Publisher :
IEEE, 2021.

Details

Database :
OpenAIRE
Journal :
2021 IEEE International Electron Devices Meeting (IEDM)
Accession number :
edsair.doi...........d8cad7a34610f8070502ae848043a036
Full Text :
https://doi.org/10.1109/iedm19574.2021.9720639