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A Back Illuminated 6 µm SPAD Pixel Array with High PDE and Timing Jitter Performance
- Source :
- 2021 IEEE International Electron Devices Meeting (IEDM).
- Publication Year :
- 2021
- Publisher :
- IEEE, 2021.
Details
- Database :
- OpenAIRE
- Journal :
- 2021 IEEE International Electron Devices Meeting (IEDM)
- Accession number :
- edsair.doi...........d8cad7a34610f8070502ae848043a036
- Full Text :
- https://doi.org/10.1109/iedm19574.2021.9720639