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A Novel Chemical Lift-Off Process based on Embedded Nano-rods Template
- Source :
- Extended Abstracts of the 2011 International Conference on Solid State Devices and Materials.
- Publication Year :
- 2011
- Publisher :
- The Japan Society of Applied Physics, 2011.
- Subjects :
- Lift (force)
Materials science
Process (computing)
Nanotechnology
Nano rods
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- Extended Abstracts of the 2011 International Conference on Solid State Devices and Materials
- Accession number :
- edsair.doi...........d91a7e9379bc18889f80b04152a21bbf
- Full Text :
- https://doi.org/10.7567/ssdm.2011.m-1-6