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Origin of the Out-of-Equilibrium Body Potential In Silicon on Insulator Devices With Metal Contacts
- Source :
- IEEE Electron Device Letters. 42:1834-1837
- Publication Year :
- 2021
- Publisher :
- Institute of Electrical and Electronics Engineers (IEEE), 2021.
-
Abstract
- This work addresses the origin of the transient body potential variation in silicon on insulator (SOI) with deposited metal contacts, under back-gate bias sweep from accumulation to inversion. The phenomenon arises from the difficulty to inject carriers into the silicon film due to the Schottky contact between the metal and the low p-type doped silicon. The Schottky diode current is controlled by the back-gate voltage, which fixes the potential at the bottom of the low-doped film. When the back-gate voltage drives the silicon film towards inversion, the limited current from the Schottky contact induces a deficit of minority carriers in the film and brings the body potential in an out-of-equilibrium regime. This phenomenon will be reproduced with numerical modelling based on Poisson and continuity equations, including the quasi-Fermi potential. The transient character and its dependence on the Schottky barrier height will be evidenced. A simple and effective combination of the classic Schottky current equation and inversion current calculated from the Lambert function, as in fully depleted (FD)-SOI MOSFETs, confirms the origin of the effect.
- Subjects :
- Materials science
Silicon
Condensed matter physics
Schottky barrier
Doping
chemistry.chemical_element
Silicon on insulator
Schottky diode
Condensed Matter::Mesoscopic Systems and Quantum Hall Effect
Electronic, Optical and Magnetic Materials
Condensed Matter::Materials Science
symbols.namesake
chemistry
Lambert W function
symbols
Transient (oscillation)
Electrical and Electronic Engineering
Voltage
Subjects
Details
- ISSN :
- 15580563 and 07413106
- Volume :
- 42
- Database :
- OpenAIRE
- Journal :
- IEEE Electron Device Letters
- Accession number :
- edsair.doi...........da745c63e5ba24dc5950ca334bba3b21