Energy Control of Incident Ions to the Chamber-Wall by Using Push–Pull Bias (Phase-Controlled Bias) in UHF-ECR Etching System

The effect of Push–Pull bias (phase-controlled bias) on the plasma potential and sputtering at the chamber-wall was investigated. It was found that the plasma potential could be controlled unrelated to the geometrical configuration of the chamber by using phase-controlled bias. The reason is that by using phase-controlled bias in the plasma with a magnetic field, the earth function of both electrodes facing each other can be controlled. Specifically, with the phase difference set to 180 degrees, the plasma potential was minimized and the decreased energy of incident ions to the chamber-wall reduced sputtering at the chamber-wall. Therefore, a stable process performance without particles caused by a sputtering at the chamber-wall, was expected by using Push-Pull bias in the dielectric UHF-ECR etching system.