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Reliability of Ultrathin High-κ Dielectrics on Chemical-vapor Deposited 2D Semiconductors
- Source :
- 2020 IEEE International Electron Devices Meeting (IEDM).
- Publication Year :
- 2020
- Publisher :
- IEEE, 2020.
-
Abstract
- 2D semiconductors are considered to be one of the most promising channel materials to extend transistor scaling. However, the integration of ultra-thin dielectrics on 2D semiconductors has been challenging, and the reliability has not been investigated to date. Here, using monolayer 3,4,9,10-perylenetetracarboxylic dianhydride (PTCDA) molecules as interface layer, we realize EOT as low as 1.7 nm on large-area monolayer CVD MoS 2 . The reliability of ultrathin high-κ dielectric on 2D semiconductors is systematically studied for the first time. The median breakdown (BD) field of HfO 2 /PTCDA stack is over 8.42 MV/cm, which is two times that of HfO 2 /Si under the same EOT. Through TDDB we project that the gate dielectric can work reliably for 10 years under E BD = 6.5 MV/cm, which shows 85% improvement than HfO 2 /Si. The BD current increase rate in our gate stack is several orders of magnitude smaller than HfO 2 /Si. The excellent reliability suggests that molecular interfacial layer is a promising dielectric technology for 2D electronics.
Details
- Database :
- OpenAIRE
- Journal :
- 2020 IEEE International Electron Devices Meeting (IEDM)
- Accession number :
- edsair.doi...........db2651a10d5528b4b17f0f2002579020