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Integration and dielectric reliability of 30nm ½ pitch structures in Aurora ®LK HM
- Source :
- Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials.
- Publication Year :
- 2009
- Publisher :
- The Japan Society of Applied Physics, 2009.
- Subjects :
- Materials science
Dielectric reliability
Nanotechnology
Engineering physics
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials
- Accession number :
- edsair.doi...........dbca50be4361dda80eb5e87e5b4a7314