Ultrathin Soi Structures by Low Energy Oxygen Implantation

MLA

J. M. Manke, et al. “Ultrathin Soi Structures by Low Energy Oxygen Implantation.” MRS Proceedings, vol. 235, Jan. 1991. EBSCOhost, https://doi.org/10.1557/proc-235-109.

APA

J. M. Manke, B. Buchanan, Fereydoon Namavar, N. M. Kalkhoran, & E. Cortesi. (1991). Ultrathin Soi Structures by Low Energy Oxygen Implantation. MRS Proceedings, 235. https://doi.org/10.1557/proc-235-109

Chicago

J. M. Manke, B. Buchanan, Fereydoon Namavar, N. M. Kalkhoran, and E. Cortesi. 1991. “Ultrathin Soi Structures by Low Energy Oxygen Implantation.” MRS Proceedings 235 (January). doi:10.1557/proc-235-109.