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Rotational angle measurement of galvanometer using reflective circular grating
- Source :
- Chinese Optics. 14:643-651
- Publication Year :
- 2021
- Publisher :
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2021.
Details
- ISSN :
- 20951531
- Volume :
- 14
- Database :
- OpenAIRE
- Journal :
- Chinese Optics
- Accession number :
- edsair.doi...........dc4d59fa84ae64b50b0842c630880f62
- Full Text :
- https://doi.org/10.37188/co.2020-0179