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Rotational angle measurement of galvanometer using reflective circular grating

Authors :
Lü Si-hang
Ding Hong-chang
Xiang Yang
Liu Yong-kun
Source :
Chinese Optics. 14:643-651
Publication Year :
2021
Publisher :
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2021.

Details

ISSN :
20951531
Volume :
14
Database :
OpenAIRE
Journal :
Chinese Optics
Accession number :
edsair.doi...........dc4d59fa84ae64b50b0842c630880f62
Full Text :
https://doi.org/10.37188/co.2020-0179