Beryllium-Based Multilayer Mirrors for the Soft X-Ray and Extreme Ultraviolet Wavelength Ranges

Authors :: Yu. A. Vainer
Nikolay I. Chkhalo
Vladimir N. Polkovnikov
M. V. Svechnikov
R. M. Smertin
S. A. Garakhin
M.G. Sertsu
Franz Schäfers
N. N. Salashchenko
R. S. Pleshkov
A. N. Nechay
S. Yu. Zuev
Andrey Sokolov
Source :: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 14:124-134
Publication Year :: 2020
Publisher :: Pleiades Publishing Ltd, 2020.
Abstract: The latest experimental results of studying beryllium-containing multilayer mirrors are reviewed. The mirrors are of interest for projection nanolithography, solar astronomy, X-ray microscopy, and other applications. It is shown that for a number of ranges beryllium-containing multilayer mirrors outperform the world analogues in their X-ray optical characteristics.

ISSN :: 18197094 and 10274510
Volume :: 14
Database :: OpenAIRE
Journal :: Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
Accession number :: edsair.doi...........dc6aa108ca0ac660ec3024d693f80925
Full Text :: https://doi.org/10.1134/s1027451020020160

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