Advanced Phosphorus Emitters for High Efficiency Si Solar Cells

Authors :: Janssens, T.
Posthuma, N.E.
Van Kerschaver, E.
Baert, K.
Choulat, P.
Everaert, J.L.
Goosens, J.
Vandervorst, W.
Poortmans, J.
Publication Year :: 2009
Publisher :: WIP-Munich, 2009.
Abstract: 24th European Photovoltaic Solar Energy Conference, 21-25 September 2009, Hamburg, Germany; 1843-1846<br />To improve the front passivation phosphorus emitters for high efficiency Si solar cells require a low surface concentration and high sheet resistance. The fabrication of such emitters is studied with a process based on plasma doping or POCl3 diffusion. The improved passivation of POCl3 based emitters results in an increase in Voc. Plasma doping is shown to be a valuable candidate to simplify and better control the advanced emitter formation.