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The Effect of Ozone Exposure on the Frequency-Pressure Characteristics of an Oscillator for Gaseous Viscosity Measurements

Authors :
Akira Kurokawa
Sinya Terauchi
Hisao Hojo
Takichi Kobayashi
Mika Itoh
Source :
Journal of the Vacuum Society of Japan. 56:163-166
Publication Year :
2013
Publisher :
The Vacuum Society of Japan, 2013.

Subjects

Subjects :
General Materials Science
Surfaces and Interfaces
Instrumentation
Spectroscopy

Details

ISSN :
18824749 and 18822398
Volume :
56
Database :
OpenAIRE
Journal :
Journal of the Vacuum Society of Japan
Accession number :
edsair.doi...........de0c2993c6b6538b80009d0aa150ce79
Full Text :
https://doi.org/10.3131/jvsj2.56.163
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