Back to Search Start Over

Epitaxial Regrowth of Amorphous or Polycrystalline Silicon Layers on Silicon Single Crystals and Bridging Epitaxy by Flash Lamp Irradiation

Authors :
R Klabes
J Matthai
M. Voelskow
E Wieser
J . - W Erbejt
W Scharff
C. Weissmantel
Publication Year :
1984
Publisher :
De Gruyter, 1984.

Details

Database :
OpenAIRE
Accession number :
edsair.doi...........de4a6f51430b423514b60f6eaa6a3439
Full Text :
https://doi.org/10.1515/9783112501580-033