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Optimization of via etching process of LTPS TFT interlayer dielectric
- Source :
- Chinese Journal of Liquid Crystals and Displays. 31:363-369
- Publication Year :
- 2016
- Publisher :
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2016.
Details
- ISSN :
- 10072780
- Volume :
- 31
- Database :
- OpenAIRE
- Journal :
- Chinese Journal of Liquid Crystals and Displays
- Accession number :
- edsair.doi...........decdd7c16999e168295990c6310ffffc
- Full Text :
- https://doi.org/10.3788/yjyxs20163104.0363