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UV Raman and XPS studies of hydrogenous diamond-like carbon films prepared by PECVD

Authors :
Jin Fa-Ya
Yang Fa-Zhan
Wang Shiqing
Tang De-Li
Shen Li-Ru
Liu Haifeng
Source :
Acta Physica Sinica. 62:017802
Publication Year :
2013
Publisher :
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences, 2013.

Abstract

The hydrogenous diamond-like carbon (DLC) films deposited on Si substrates using pulsed glow discharge method are investigated using Raman spectroscopy and X-ray photoelectron spectroscopy method. The UV Raman spectrum for excitation wavelength is 325 nm. UV Raman is particularly useful for hydrogenous DLC, as it gives clear measurements in the D and G peak spectral region even for highly hydrogenated samples, for which the visible Raman spectra are overshadowed by photoluminescence. The sp3 bonding of hydrogenous DLC film can be effectively studied by X-ray photoelectron spectroscopy method, and the data from the X-ray photoelectron spectroscopy method are compared with Raman results. It is found that G peak shows a shift to ward a higher wave under UV excitation. For the G peak, I(D)/I(G), G-FWHM and sp3, there exists a relationship among them.

Details

ISSN :
10003290
Volume :
62
Database :
OpenAIRE
Journal :
Acta Physica Sinica
Accession number :
edsair.doi...........def8541eaa0bccf388c7186e684ff8aa