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Ultrasensitive and flexible humidity sensors fabricated by ion beam sputtering and deposition from polydimethylsiloxane

Authors :
Da Xu
Bin Liu
Nan Wang
Jingyu Zhou
Lei Tang
Dawei Zhang
Bin Sheng
Source :
Vacuum. 213:112125
Publication Year :
2023
Publisher :
Elsevier BV, 2023.

Subjects

Subjects :
Condensed Matter Physics
Instrumentation
Surfaces, Coatings and Films

Details

ISSN :
0042207X
Volume :
213
Database :
OpenAIRE
Journal :
Vacuum
Accession number :
edsair.doi...........dffc1275f4b5673acab322c6d4948cdc

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