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New way of preparing ion barrier ultrathin film without pollution

Authors :
Jingquan Tian
Qingduo Duanmu
Delong Jiang
Yaohua Lu
Ye Li
Lichen Fu
Source :
Fourth International Conference on Thin Film Physics and Applications.
Publication Year :
2000
Publisher :
SPIE, 2000.

Abstract

A new technology and method preparing ions barrier film on the input face of multi-hole substratum, MCP, without carbon pollution were studied and introduced in this paper. The composition of the film and the performance of MCP coated with ion barrier film were tested by XPS and UV photoelectric emission method. The new process made the carbon content largely decrease in the film, and the characteristics of MCP unmodified.

Details

ISSN :
0277786X
Database :
OpenAIRE
Journal :
Fourth International Conference on Thin Film Physics and Applications
Accession number :
edsair.doi...........e220ac9de409a87b7bfa4e2aabda343f
Full Text :
https://doi.org/10.1117/12.408290