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New way of preparing ion barrier ultrathin film without pollution
- Source :
- Fourth International Conference on Thin Film Physics and Applications.
- Publication Year :
- 2000
- Publisher :
- SPIE, 2000.
-
Abstract
- A new technology and method preparing ions barrier film on the input face of multi-hole substratum, MCP, without carbon pollution were studied and introduced in this paper. The composition of the film and the performance of MCP coated with ion barrier film were tested by XPS and UV photoelectric emission method. The new process made the carbon content largely decrease in the film, and the characteristics of MCP unmodified.
Details
- ISSN :
- 0277786X
- Database :
- OpenAIRE
- Journal :
- Fourth International Conference on Thin Film Physics and Applications
- Accession number :
- edsair.doi...........e220ac9de409a87b7bfa4e2aabda343f
- Full Text :
- https://doi.org/10.1117/12.408290