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The EUV mask as a system: function breakdown and interface description

Authors :
Jo Finders
Claire van Lare
D.S. Nam
Par Broman
Eelco van Setten
Frank de Lange
Frank Timmermans
Source :
Optical and EUV Nanolithography XXXV.
Publication Year :
2022
Publisher :
SPIE, 2022.

Details

Database :
OpenAIRE
Journal :
Optical and EUV Nanolithography XXXV
Accession number :
edsair.doi...........e29f533cb666b931ed7e840b84444c90

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