Real-Time Diagnosis of Nano-Sized Contaminant Particles Generated in TiN Metal Organic Chemical Vapor Deposition

We investigated characteristics of contaminant particles generated in titanium nitride (TiN) metal organic chemical vapor deposition (MOCVD) using tetrakis(dimethyl-amino-titanium) (TDMAT) as a precursor. Variation of the particle distribution generated before and after decomposition of TDMAT was estimated with the modified particle beam mass spectrometer (PBMS) in real-time. Particle size and concentration were sensitive to the change of the chemical status of TDMAT. When integrated absorbance of CH3 stretching features was increased, Particle size and concentration were bigger and higher, respectively. The degree of thermal decomposition of TMDAT was verified with in-situ Fourier transform infrared (FT-IR) spectroscopy and the morphology of films was measured by atomic force microscopy (AFM).