Improvement in performance of indium gallium oxide thin film transistor via oxygen mediated crystallization at a low temperature of 200 °C

Authors :: Hyeong Jin Park
Taikyu Kim
Min Jae Kim
Hojae Lee
Jun Hyung Lim
Jae Kyeong Jeong
Source :: Ceramics International. 48:12806-12812
Publication Year :: 2022
Publisher :: Elsevier BV, 2022.

Subjects :: Process Chemistry and Technology
Materials Chemistry
Ceramics and Composites
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

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