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Sub-nm Resolution, Sub-pm Precision Structure Mapping Robust to Thickness and Tilt Variations by Cepstral Analysis of Scanning Nanodiffraction 4D-STEM

Authors :
Elliot Padget
Paul Cueva
David A. Muller
Source :
Microscopy and Microanalysis. 25:1934-1935
Publication Year :
2019
Publisher :
Oxford University Press (OUP), 2019.

Subjects

Subjects :
Tilt (optics)
Optics
Materials science
business.industry
Structure mapping
Resolution (electron density)
Cepstral analysis
business
Instrumentation

Details

ISSN :
14358115 and 14319276
Volume :
25
Database :
OpenAIRE
Journal :
Microscopy and Microanalysis
Accession number :
edsair.doi...........e6c1d235faf947d04e34905cac9b0d00
Full Text :
https://doi.org/10.1017/s1431927619010407
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