Fabrication of multiple height microstructures using UV lithography on timed-development-and-thermal-reflowed photoresist

MLA

Kangsun Lee, et al. “Fabrication of Multiple Height Microstructures Using UV Lithography on Timed-Development-and-Thermal-Reflowed Photoresist.” 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Jan. 2010. EBSCOhost, https://doi.org/10.1109/memsys.2010.5442486.

APA

Kangsun Lee, Jungkwun Kim, Kwang W. Oh, Hongsub Jee, & Yong-Kyu Yoon. (2010). Fabrication of multiple height microstructures using UV lithography on timed-development-and-thermal-reflowed photoresist. 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS). https://doi.org/10.1109/memsys.2010.5442486

Chicago

Kangsun Lee, Jungkwun Kim, Kwang W. Oh, Hongsub Jee, and Yong-Kyu Yoon. 2010. “Fabrication of Multiple Height Microstructures Using UV Lithography on Timed-Development-and-Thermal-Reflowed Photoresist.” 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), January. doi:10.1109/memsys.2010.5442486.